Перегляд за автором "Zykov, A.V."

Сортувати за: Порядок: Результатів:

  • 2D fluid model for interactive development of ICP technological tools 
    Gapon, A.V.; Dahov, A.N.; Dudin, S.V.; Zykov, A.V.; Azarenkov, N.A. (Вопросы атомной науки и техники, 2006)
    The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working gas type are the input data. The results of calculation are inductor voltage, ion current density distribution ...
  • Break-down of the magnetically insulated diode 
    Zagrebelnyy, I.A.; Zykov, A.V.; Glaznev, M.V. (Вопросы атомной науки и техники, 2007)
    In the present work the comparative analysis of computer simulation results and experimental data for “Radical” ion source is carried out. The break-down curves are presented for different boundary conditions, such as: ...
  • Experimental research of ICP reactor for plasma-chemical etching 
    Dudin, S.V.; Zykov, A.V.; Dahov, A.N.; Farenik, V.I. (Вопросы атомной науки и техники, 2006)
    The results of systematic experimental researches of plasma-chemical etching reactor in the inductive mode are presented in this paper. Measurements of the integral discharge parameters (inductor voltage, gas pressure, ...
  • Ignition and break-down of the gas discharge in magnetic field 
    Zykov, A.V.; Azarenkov, N.A. (Вопросы атомной науки и техники, 2015)
    The characteristics of the low pressure discharge in crossed electric and magnetic fields in the cases of magnetically insulated diode and electron anode layer with free cathode boundary are described. The phenomenal theory ...
  • Integral cluster set-up for complex compound composites syntesis 
    Yakovin, S.D.; Dudin, S.V.; Zykov, A.V.; Farenik, V.I. (Вопросы атомной науки и техники, 2011)
    At present study the result of development and investigations of cluster technological set-up for synthesis of complex compound composites is demonstrated. The present set-up consist of complimentary DC-magnetron ...
  • Oxygen activation effect on reactive magnetron synthesis of alumina coatings 
    Walkowicz, J.; Zykov, A.V.; Dudin, S.V.; Yakovin, S.D. (Вопросы атомной науки и техники, 2007)
    The investigation results of the DC magnetron sputtering system for synthesis of high-quality oxide coatings are presented. In the system oxygen, activated by an independent Inductively-Coupled Plasma (ICP) source, is ...
  • Plasma assisted conversion of carbon dioxide in low-pressure gas discharges 
    Dudin, S.V.; Zykov, A.V.; Yakovin, S.D. (Вопросы атомной науки и техники, 2019)
    Experimental results of comparative study of carbon dioxide conversion efficiency to CO and O₂ in the plasmas of different low-pressure discharges are presented. Inductively coupled plasma source, magnetron discharge and ...
  • The energy balance of the asymmetric combined inductive-capacitive RF discharge at low pressure 
    Zykov, A.V.; Polozhiy, K.I.; Farenik, V.I. (Вопросы атомной науки и техники, 2003)
    The combined inductive-capacitive RF discharge at low gas pressure is considered for a case of collisionless ion motion. The power distribution model in the combined RF discharge in case of two asymmetric RF electrodes is ...